Specification

Features

High-resolution imaging at low accelerating voltage.
The electromagnetic compound mirror reduces aberrations, significantly improves resolution at low voltages, and allows observation of magnetic samples.
High-pressure tunneling technology (SuperTunnel), where the electrons in the tunnel can maintain high energy, reducing space charge effects and ensuring low voltage resolution.
The electronic optical path without crossover effectively reduces system aberration and improves resolution.
Water-cooled constant temperature objective lens, to ensure the stability, reliability, and repeatability of the objective lens work.
Magnetic deflection six-hole adjustable diaphragm, automatic switching diaphragm hole, no mechanical adjustment, to achieve high-resolution observation or large beam analysis mode fast switching.